40 CFR Appendix Table I-1 to Subpart I of Part 98 - Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination

Product type Emission factors EFi
CF4 C2F6 CHF3 c-C4F8 C3F8 NF3 SF6 N2O
Semiconductors (kg/m 2) 0.9 1.0 0.04 NA 0.05 0.04 0.20 NA
LCD (g/m 2) 0.65 NA 0.0024 0.00 NA 1.29 4.14 17.06
MEMS (kg/m 2) 0.015 NA NA 0.076 NA NA 1.86 NA

Notes: NA denotes not applicable based on currently available information.

[89 FR 31919, Apr. 25, 2024]