40 CFR Appendix Table I-1 to Subpart I of Part 98 - Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
Table I-1 to Subpart I of Part 98—Default Emission Factors for Manufacturing Capacity-Based Threshold Applicability Determination
| Product type | Emission factors EF |
|||||||
|---|---|---|---|---|---|---|---|---|
| CF |
C |
CHF |
c-C |
C |
NF |
SF |
N |
|
| Semiconductors (kg/m 2) | 0.9 | 1.0 | 0.04 | NA | 0.05 | 0.04 | 0.20 | NA |
| LCD (g/m 2) | 0.65 | NA | 0.0024 | 0.00 | NA | 1.29 | 4.14 | 17.06 |
| MEMS (kg/m 2) | 0.015 | NA | NA | 0.076 | NA | NA | 1.86 | NA |
Notes: NA denotes not applicable based on currently available information.
[89 FR 31919, Apr. 25, 2024]