40 CFR Appendix Table I-12 to Subpart I of Part 98 - Table I–12 to Subpart I of Part 98—Default Emission Factors (1–Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)
Table I–12 to Subpart I of Part 98—Default Emission Factors (1–Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)
[78 FR 68230, Nov. 13, 2013]