Semiconductor manufacturing process unit
Semiconductor manufacturing process unit means the collection of equipment used to carry out a discrete operation in the semiconductor manufacturing process. These operations include, but are not limited to, crystal growing; solvent stations used to prepare and clean materials for subsequent processing or for parts cleaning; wet chemical stations used for cleaning (other than solvent cleaning); photoresist application, developing, and stripping; etching; gaseous operation stations used for stripping, cleaning, doping, etching, and layering; separation; encapsulation; and testing. Research and development operations associated with semiconductor manufacturing and conducted at a semiconductor manufacturing facility are considered to be semiconductor manufacturing process units.
Source
40 CFR § 63.7195
Scoping language
Terms used in this subpart are defined in the Clean Air Act, in 63.2 and 63.981, the General Provisions of this part (40 CFR part 63, subpart A), and in this section as follows: