Semiconductor manufacturing

Semiconductor manufacturing means the collection of semiconductor manufacturing process units used to manufacture p-type and n-type semiconductors or active solid state devices from a wafer substrate, including processing from crystal growth through wafer fabrication, and testing and assembly. Examples of semiconductor or related solid state devices include semiconductor diodes, semiconductor stacks, rectifiers, integrated circuits, and transistors.

Source

40 CFR § 63.7195

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Scoping language

Terms used in this subpart are defined in the Clean Air Act, in 63.2 and 63.981, the General Provisions of this part (40 CFR part 63, subpart A), and in this section as follows:

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