Process vent

Process vent means the point at which HAP emissions are released to the atmosphere from a semiconductor manufacturing process unit or storage tank by means of a stack, chimney, vent, or other functionally equivalent opening. The HAP emission points originating from wastewater treatment equipment, other than storage tanks, are not considered to be a process vent, unless the wastewater treatment equipment emission points are connected to a common vent or exhaust plenum with other process vents.


40 CFR § 63.7195

Scoping language

Terms used in this subpart are defined in the Clean Air Act, in 63.2 and 63.981, the General Provisions of this part (40 CFR part 63, subpart A), and in this section as follows:

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