Mich. Admin. Code R. 29.1672 - Semiconductor facilities
Rule 22. Section 23.3 of the code is deleted and section 23.1 of chapter 23 of the code is amended to read as follows:
23.1 General. All semiconductor facilities
containing a clean room or a clean zone, or both, shall comply with NFPA 318,
standard for the protection of semiconductor fabrication facilities, and
chapter 23 as they relate to operation and maintenance.
23.3 Deleted.
Notes
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