40 CFR Appendix Table I-12 to Subpart I of Part 98 - Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method
Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method
Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method
[300 mm and 450 mm Wafers]
| All processes | Process gas i | |||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| CF |
C |
CHF |
CH
|
CH
|
C |
C |
C |
NF |
NF Remote |
SF
|
C |
C |
C |
|
| 1-U |
0.65 | 0.80 | 0.37 | 0.20 | 0.30 | 0.30 | 0.063 | 0.183 | 0.19 | 0.018 | 0.30 | 0.15 | 0.100 | NA |
| BCF |
NA | 0.21 | 0.076 | 0.060 | 0.029 | 0.21 | NA | 0.045 | 0.040 | 0.037 | 0.033 | 0.059 | 0.109 | NA |
| BC |
0.058 | NA | 0.058 | 0.043 | 0.0093 | 0.18 | NA | 0.027 | 0.0204 | NA | 0.041 | 0.062 | 0.083 | NA |
| BC |
0.0083 | NA | 0.01219 | NA | 0.001 | NA | NA | 0.008 | NA | NA | NA | NA | NA | NA |
| BC |
0.0046 | NA | 0.00272 | 0.054 | 0.007 | NA | NA | NA | NA | NA | NA | 0.0051 | NA | NA |
| BC |
NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.00012 | NA |
| BCH |
0.005 | NA | 0.0024 | NA | 0.0033 | NA | NA | 0.0021 | 0.00034 | 0.00088 | 0.000020 | 0.000030 | NA | NA |
| BCH |
0.0061 | NA | 0.027 | 0.0036 | NA | 0.0007 | NA | 0.0063 | 0.0036 | 0.0028 | 0.0082 | 0.00065 | NA | NA |
| BCHF |
0.012 | NA | NA | 0.057 | 0.016 | 0.012 | NA | 0.028 | 0.0106 | 0.000059 | 0.0039 | 0.017 | 0.0069 | NA |
| BF |
NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.50 | NA | NA | NA | NA |
[89 FR 31922, Apr. 25, 2024]