40 CFR Appendix Table I-6 to Subpart I of Part 98 - Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing
Table I-6 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing
| Process type factors | Process gas i | ||||||||
|---|---|---|---|---|---|---|---|---|---|
| CF |
C |
CHF |
CH
|
C |
c− C |
NF Remote |
NF |
SF
|
|
| Etch 1-U |
0.6 | NA | 0.2 | NA | NA | 0.1 | NA | NA | 0.3 |
| Etch BCF |
NA | NA | 0.07 | NA | NA | 0.009 | NA | NA | NA |
| Etch BCHF |
NA | NA | NA | NA | NA | 0.02 | NA | NA | NA |
| Etch BC |
NA | NA | 0.05 | NA | NA | NA | NA | NA | NA |
| CVD Chamber Cleaning 1-U |
NA | NA | NA | NA | NA | NA | 0.03 | 0.3 | 0.9 |
Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.
[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]